Stress evolution in molybdenum / silicon multilayer mirrors for extreme ultraviolet lithography
- James Mac Freitag.
- Physical description
- x, 111 leaves, bound.
- Freitag, James Mac.
- Clemens, B. M. (Bruce M.), primary advisor.
- Stanford University. Department of Materials Science and Engineering
- Publication date
- Submitted to the Department of Materials Science and Engineering.
- Copyright by the author.
- Thesis (Ph. D.) -- Stanford University, 2000.
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