Chemical sensing with capacitive micromachined ultrasonic transducers [electronic resource]
- George Quintin Stedman.
- Physical description
- 1 online resource.
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|3781 2017 S||In-library use|
- Stedman, George Quintin.
- Fejer, Martin M. (Martin Michael), primary advisor.
- Khuri-Yakub, Butrus T., 1948- primary advisor.
- Greenleaf, William James, advisor.
- Stanford University. Department of Applied Physics.
- There is a wide array of potential applications for chemical sensors that are sensitive, but also small and inexpensive. Such sensors could be used for detection of dangerous chemicals, air quality monitoring, or even health monitoring. Gravimetric chemical sensors based on capacitive micromachined ultrasonic transducers (CMUTs) are a good candidate technology for such sensors, given their high sensitivity and low cost due to batch fabrication. In this work, we demonstrate an electronic nose using CMUT chemical sensors. We show that this electronic nose, in conjunction with machine learning algorithms, is able to distinguish between several chemicals, recognize ammonia in a background of water vapor, and distinguish coffee beans of different origin. We discuss the design and fabrication of the chemical sensor chip, the electronic circuits used to operate it, and efforts to reduce the drift of the sensor.
- Publication date
- Submitted to the Department of Applied Physics.
- Thesis (Ph.D.)--Stanford University, 2017.
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