Nanofabrication on unconventional substrates using transferred hard masks [electronic resource]

Imprint
Washington, D.C. : United States. Dept. of Energy. ; Oak Ridge, Tenn. : distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy, 2015
Physical description
Article No. 7802 : digital, PDF file.
Librarian view | Catkey: 11764354