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1. TiO2-based superhydrophobic-superhydrophilic pattern with an extremely high wettability contrast [2014]
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NISHIMOTO, Shunsuke, BECCHAKU, Michiaki, KAMESHIMA, Yoshikazu, SHIROSAKI, Yuki, HAYAKAWA, Satoshi, OSAKA, Akiyoshi, and MIYAKE, Michihiro
- Thin solid films. 558:221-226
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Crystallography, Cristallographie cristallogenèse, Metallurgy, welding, Métallurgie, soudage, Condensed state physics, Physique de l'état condensé, Sciences exactes et technologie, Exact sciences and technology, Physique, Physics, Etat condense: structure, proprietes mecaniques et thermiques, Condensed matter: structure, mechanical and thermal properties, Surfaces et interfaces; couches minces et trichites (structure et propriétés non électroniques), Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties), Interfaces solide-fluide, Solid-fluid interfaces, Mouillage, Wetting, Structure et morphologie de couches minces, Thin film structure and morphology, Structure et morphologie; épaisseur, Structure and morphology; thickness, Domaines interdisciplinaires: science des materiaux; rheologie, Cross-disciplinary physics: materials science; rheology, Science des matériaux, Materials science, Nanomatériaux et nanostructures : fabrication et caractèrisation, Nanoscale materials and structures: fabrication and characterization, Divers, Other topics in nanoscale materials and structures, Chimie, Chemistry, Chimie generale et chimie physique, General and physical chemistry, Théorie des réactions, cinétique générale. Catalyse. Nomenclature, documentation chimique, informatique chimique, Theory of reactions, general kinetics. Catalysis. Nomenclature, chemical documentation, computer chemistry, Catalyse, Catalysis, Catalyseurs: préparations et propriétés, Catalysts: preparations and properties, Aire superficielle, Surface area, Area superficial, Aire sélective, Selective area, Anatase, Anatasa, Angle contact, Contact angle, Angulo contacto, Autoassemblage, Self assembly, Autoensamble, Catalyseur, Catalyst, Catalizador, Composé hydrophobe, Hydrophobic compound, Compuesto hidrofobo, Couche autoassemblée, Self-assembled layer, Capa autoensamblada, Croissance cristalline en solution, Crystal growth from solutions, Effet photoinduit, Photoinduced effect, Efecto fotoinducido, Effet rayonnement, Radiation effect, Efecto radiación, Mouillabilité, Wettability, Remojabilidad, Nanostructure, Nanoestructura, Photocatalyse, Photocatalysis, Fotocatálisis, Rugosité, Roughness, Rugosidad, Synthèse hydrothermale, Hydrothermal synthesis, Titane, Titanium, Titanio, Traitement surface, Surface treatment, Tratamiento superficie, 6808B, 6855J, 8110D, Photocatalyst, Self-assembled monolaye, Superhydrophobic-superhydrophilic pattern, and Titanium dioxide
- Abstract
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Rough nanostructured anatase TiO2 surfaces containing many pores were prepared by the hydrothermal-based method. Surface modification with self-assembled monolayers (SAMs) of octadecylphosphonic acid (ODP) resulted in the superhydrophobic surface with an extremely high static water contact angle (CA) of 173.6° ± 1.7°. This superhydrophobic surface could be converted into a superhydrophilic surface with a water CA of nearly 0° by irradiating it with ultraviolet (UV) light, which induced photocatalytic decomposition of the ODP SAM. A superhydrophobic-superhydrophilic pattern with an extremely high wettability contrast (a water CA difference of over 170°) could be fabricated on the ODP-modified TiO2 surface by area-selective UV irradiation through a photomask. This is the report of the TiO2-based superhydrophobic-superhydrophilic pattern with a water CA difference of over 170°, and it may be possible to use such patterns for various applications.
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CHOI, Jae-Hyeok, KIM, Seong-Oh, HILTON, Diana L, and CHO, Nam-Joon
- Thin solid films. 565:179-185
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Crystallography, Cristallographie cristallogenèse, Metallurgy, welding, Métallurgie, soudage, Condensed state physics, Physique de l'état condensé, Sciences exactes et technologie, Exact sciences and technology, Physique, Physics, Etat condense: structure, proprietes mecaniques et thermiques, Condensed matter: structure, mechanical and thermal properties, Surfaces et interfaces; couches minces et trichites (structure et propriétés non électroniques), Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties), Structure et morphologie de couches minces, Thin film structure and morphology, Structure et morphologie; épaisseur, Structure and morphology; thickness, Chimie, Chemistry, Chimie generale et chimie physique, General and physical chemistry, Théorie des réactions, cinétique générale. Catalyse. Nomenclature, documentation chimique, informatique chimique, Theory of reactions, general kinetics. Catalysis. Nomenclature, chemical documentation, computer chemistry, Catalyse, Catalysis, Catalyseurs: préparations et propriétés, Catalysts: preparations and properties, Sciences appliquees, Applied sciences, Electronique, Electronics, Electronique des semiconducteurs. Microélectronique. Optoélectronique. Dispositifs à l'état solide, Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices, Dispositifs optoélectroniques, Optoelectronic devices, Angle contact, Contact angle, Angulo contacto, Attaque chimique, Chemical etching, Ataque químico, Catalyseur, Catalyst, Catalizador, Cinétique réaction, Reaction kinetics, Couche mince, Thin film, Capa fina, Diode électroluminescente, Light emitting diode, Diodo electroluminescente, Dissolution, Disolución, Dépendance du temps, Time dependence, Dependencia del tiempo, Effet concentration, Concentration effect, Efecto concentración, Electrolyte, Electrólito, Gravure, Engraving, Grabado, Indium, Indio, Microbalance quartz, Quartz microbalance, Microbalanza cuarzo, Microscopie force atomique, Atomic force microscopy, Microscopía fuerza atómica, Modèle cinétique, Kinetic model, Modelo cinético, Oxyde d'indium, Indium oxide, Indio óxido, Oxyde d'étain, Tin oxide, Estaño óxido, Porosité, Porosity, Porosidad, Réaction chimique, Chemical reaction, Reacción química, Spectre photoélectron RX, X-ray photoelectron spectra, Traitement chimique, Chemical treatment, Tratamiento químico, Traitement surface, Surface treatment, Tratamiento superficie, pH, 6855J, 8560D, 8560J, Etching, Indium tin oxide, Quartz crystal microbalance, and X-ray photoelectron spectroscopy
- Abstract
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We report the kinetic characterization of indium tin oxide (ITO) film etching by chemical treatment in acidic and basic electrolytes. It was observed that film etching increased under more acidic conditions, whereas basic conditions led to minimal etching on the time scale of the experiments. Quartz crystal microbalance was employed in order to track the reaction kinetics as a function of the concentration of hydrochloric acid and accordingly solution pH. Contact angle measurements and atomic force microscopy experiments determined that acid treatment increases surface hydrophilicity and porosity. X-ray photoelectron spectroscopy experiments identified that film etching is primarily caused by dissolution of indium species. A kinetic model was developed to explain the acid-catalyzed dissolution of ITO surfaces, and showed a logarithmic relationship between the rate of dissolution and the concentration of undisassociated hydrochloric acid molecules. Taken together, the findings presented in this work verify the acid-catalyzed kinetics of ITO film dissolution by chemical treatment, and support that the corresponding chemical reactions should be accounted for in ITO film processing applications.
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3. Preparation and surface wettability of TiO2 nanorod films modified with triethoxyoctylsilane [2013]
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CHUNLING XU, LIANG FANG, QIULIU HUANG, BO YIN, HAIBO RUAN, and DECONG LI
- Thin solid films. 531:255-260
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Crystallography, Cristallographie cristallogenèse, Metallurgy, welding, Métallurgie, soudage, Condensed state physics, Physique de l'état condensé, Sciences exactes et technologie, Exact sciences and technology, Physique, Physics, Etat condense: structure, proprietes mecaniques et thermiques, Condensed matter: structure, mechanical and thermal properties, Surfaces et interfaces; couches minces et trichites (structure et propriétés non électroniques), Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties), Interfaces solide-fluide, Solid-fluid interfaces, Mouillage, Wetting, Domaines interdisciplinaires: science des materiaux; rheologie, Cross-disciplinary physics: materials science; rheology, Science des matériaux, Materials science, Nanomatériaux et nanostructures : fabrication et caractèrisation, Nanoscale materials and structures: fabrication and characterization, Nanotubes, Divers, Other topics in nanoscale materials and structures, Chimie, Chemistry, Chimie generale et chimie physique, General and physical chemistry, Théorie des réactions, cinétique générale. Catalyse. Nomenclature, documentation chimique, informatique chimique, Theory of reactions, general kinetics. Catalysis. Nomenclature, chemical documentation, computer chemistry, Catalyse, Catalysis, Catalyseurs: préparations et propriétés, Catalysts: preparations and properties, Addition fluor, Fluorine addition, Adición fluor, Addition étain, Tin addition, Adición estaño, Angle contact, Contact angle, Angulo contacto, Catalyseur, Catalyst, Catalizador, Couche mince, Thin film, Capa fina, Croissance cristalline en solution, Crystal growth from solutions, Diffraction RX, X ray diffraction, Difracción RX, Emission champ, Field emission, Emisión campo, Face cristalline, Crystal face, Cara cristal, Germe cristallin, Crystal seed, Germen cristalino, Microscopie RX, X ray microscopy, Microscopía rayos X, Microscopie électronique balayage, Scanning electron microscopy, Microscopía electrónica barrido, Morphologie cristalline, Crystal morphology, Morfología cristalina, Morphologie surface, Surface morphology, Mouillabilité, Wettability, Remojabilidad, Nanobâtonnet, Nanorod, Nanopalito, Nanomatériau, Nanostructured materials, Nanostructure, Nanoestructura, Oxyde de titane, Titanium oxide, Titanio óxido, Protection environnement, Environmental protection, Protección medio ambiente, Réaction dirigée, Template reaction, Reacción dirigida, Réseau (arrangement), Array, Red, Structure cristalline, Crystalline structure, Estructura cristalina, Structure surface, Surface structure, Estructura superficie, Synthèse hydrothermale, Hydrothermal synthesis, Traitement surface, Surface treatment, Tratamiento superficie, 6808B, 8107D, 8110D, Substrat verre, TiO2, Hydrophobicity, Hydrothermal deposition, Nanorods, Titanium dioxide, and Triethoxyoctylsilane
- Abstract
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Nanostructured TiO2 arrays were prepared through a facile and environmentally friendly hydrothermal method on fluorine-doped tin oxide coated glass substrates with tunable surface morphologies without using any catalysts, seeds or templates. Their crystal structure, surface morphology, compositions and wettability were investigated by X-ray diffraction, field emission scanning electron microscope, X-ray photoelectron spectroscope and contact angle measurements, respectively. It is found that the concentration of hydrochloric acid has a great influence on the morphology and wettability of TiO2 nanorod films. Typically, the film prepared with 7.0 M HCl exhibits a high water contact angle of 157.3 ± 1.5° with an advancing contact angle of 154.2 ± 1.3° and a receding contact angle of 161.2 ± 1.3° and a small sliding angle of 7° after hydrophobic treatment. The Cassie theory was used to analyze the hydrophobic phenomenon of the as-prepared film, and it reveals that only about 9% of the water surface is contacted with the TiO2 film and the remaining 91% is contacted with the air cushion, which is reasonable for the hydrophobicity of a TiO2 nanorod film.
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JINGON JANG, YEOHEUNG YOON, HYUNHAK JEONG, HYUNGWOO LEE, YOUNGGUL SONG, KYUNGJUNE CHO, SEUNGHUN HONG, HYOYOUNG LEE, and TAKHEE LEE
- Thin solid films. 542:327-331
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Crystallography, Cristallographie cristallogenèse, Metallurgy, welding, Métallurgie, soudage, Condensed state physics, Physique de l'état condensé, Sciences exactes et technologie, Exact sciences and technology, Physique, Physics, Etat condense: structure, proprietes mecaniques et thermiques, Condensed matter: structure, mechanical and thermal properties, Surfaces et interfaces; couches minces et trichites (structure et propriétés non électroniques), Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties), Structure et morphologie de couches minces, Thin film structure and morphology, Structure et morphologie; épaisseur, Structure and morphology; thickness, Sciences appliquees, Applied sciences, Electronique, Electronics, Electronique des semiconducteurs. Microélectronique. Optoélectronique. Dispositifs à l'état solide, Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices, Transistors, Argent, Silver, Plata, Couche active, Active layer, Capa activa, Grosseur grain, Grain size, Grosor grano, Impression à jet d'encre, Ink jet printing, Impresión por chorro de tinta, Morphologie, Morphology, Morfología, Pentacène, Pentacene, Pentaceno, Piégeage, Trapping, Captura, Résistivité couche, Sheet resistivity, Resistividad capa, Semiconducteur organique, Organic semiconductors, Traitement surface, Surface treatment, Tratamiento superficie, Transistor effet champ, Field effect transistor, Transistor efecto campo, 6855J, 8530P, 8530T, Oxyde de graphène, Graphene oxide, Substrat SiO2, Substrat silicium, Inkjet printing, Organic field effect transistor triisopropylsilylethynyl (TIPS) pentacene, and Reduced graphene oxide
- Abstract
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We report a performance enhancement of triisopropylsilylethynyl (TIPS) pentacene organic field effect transistors (OFETs) obtained by treating the surface of SiO2/Si substrate with dispersible reduced graphene oxide (rGO). The source and drain electrodes were patterned with inkjet-printed highly conductive silver. The sheet resistance of inkjet-patterned silver electrodes has found to be ∼1 Ω/□, which is comparable to that of typical vacuum-evaporated silver electrodes. The electrical performance has improved by rGO treatment, with a morphology improved for the active TIPS pentacene layer. The rGO treatment increased the morphological grain size of TIPS pentacene, resulting in a decreased number of interfacial trapping sites in the carrier transport paths. The field effect mobility of the TIPS pentacene OFETs, following the rGO surface treatment, was improved from 0.082 cm2/V·s to 0.141 cm2/V·s.
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WEI XIA, HAO LIN, WU, Hsiang N, and TANG, Ching W
- Thin solid films. 520(1):563-568
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Crystallography, Cristallographie cristallogenèse, Metallurgy, welding, Métallurgie, soudage, Condensed state physics, Physique de l'état condensé, Sciences exactes et technologie, Exact sciences and technology, Physique, Physics, Etat condense: structure, proprietes mecaniques et thermiques, Condensed matter: structure, mechanical and thermal properties, Surfaces et interfaces; couches minces et trichites (structure et propriétés non électroniques), Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties), Structure et morphologie de couches minces, Thin film structure and morphology, Structure et morphologie; épaisseur, Structure and morphology; thickness, Etat condense: structure electronique, proprietes electriques, magnetiques et optiques, Condensed matter: electronic structure, electrical, magnetic, and optical properties, Propriétés optiques, spectroscopie et autres interactions de la matière condensée avec les particules et le rayonnement, Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation, Photoluminescence, Domaines interdisciplinaires: science des materiaux; rheologie, Cross-disciplinary physics: materials science; rheology, Science des matériaux, Materials science, Matériaux particuliers, Specific materials, Autres semiconducteurs, Other semiconductors, Sciences appliquees, Applied sciences, Energie, Energy, Energie naturelle, Natural energy, Energie solaire, Solar energy, Conversion photovoltaïque, Photovoltaic conversion, Cellules solaires. Cellules photoélectrochimiques, Solar cells. Photoelectrochemical cells, Absorption optique, Optical absorption, Absorción óptica, Cellule solaire, Solar cell, Célula solar, Chlorure de cadmium, Cadmium chloride, Cadmio cloruro, Couche mince, Thin film, Capa fina, Cristallinité, Crystallinity, Cristalinidad, Croissance grain, Grain growth, Crecimiento grano, Diffusion(transport), Diffusion, Déconvolution, Deconvolution, Desconvolución, Défaut cristallin, Crystal defect, Defecto cristalino, Effet température, Temperature effect, Efecto temperatura, Joint grain, Grain boundary, Limite grano, Microscopie électronique balayage, Scanning electron microscopy, Microscopía electrónica barrido, Photoluminescence, Fotoluminiscencia, Piqûre corrosion, Pinhole, Picadura corrosión, Recuit thermique, Thermal annealing, Recocido térmico, Semiconducteur II-VI, II-VI semiconductors, Soufre, Sulfur, Azufre, Spectre absorption, Absorption spectrum, Espectro de absorción, Sulfure de cadmium, Cadmium sulfide, Cadmio sulfuro, Tellurure de cadmium, Cadmium tellurides, Température recuit, Annealing temperature, Temperatura recocido, Traitement chimique, Chemical treatment, Tratamiento químico, Traitement surface, Surface treatment, Tratamiento superficie, 6855J, 8105D, 8460J, CdS, CdTe, S, Substrat CdTe, Annealing, Cadmium telluride, Solar cells, and Thin films
- Abstract
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High-temperature annealing (HTA), a process step prior to vapor cadmium chloride (VCC) treatment, has been found to be useful for improving the crystallinity of CdTe films and the efficiency of ultra-thin CdTe solar cells. Scanning electron microscopy, optical absorption, photoluminescence measurements and analyses on photoluminescence results using spectral deconvolution reveal that the additional HTA step produces substantial grain growth and reduces grain boundary defects. It also reduces excessive sulfur diffusion across the junction that can occur during the VCC treatment. The HTA step helps to produce pinhole-free CdTe films and reduce electrical shorts in ultra-thin CdTe solar cells. An efficiency of about 11.6% has been demonstrated for ultra-thin CdS/CdTe solar cells processed with HTA step.
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SEON MI KONG, YUBIN XIAO, KYUNG HA KIM, WAN IN LEE, and CHEE WON CHUNG
- Thin solid films. 519(10):3173-3176
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Crystallography, Cristallographie cristallogenèse, Metallurgy, welding, Métallurgie, soudage, Condensed state physics, Physique de l'état condensé, Sciences exactes et technologie, Exact sciences and technology, Physique, Physics, Physique des gaz, des plasmas et des decharges electriques, Physics of gases, plasmas and electric discharges, Physique des plasmas et décharges électriques, Physics of plasmas and electric discharges, Décharges électriques, Electric discharges, Méthodes utilisant des décharges pour sources spectrales (incluant les plasmas couplés inductivement), Discharges for spectral sources (including inductively coupled plasmas), Etat condense: structure, proprietes mecaniques et thermiques, Condensed matter: structure, mechanical and thermal properties, Surfaces et interfaces; couches minces et trichites (structure et propriétés non électroniques), Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties), Structure et morphologie de couches minces, Thin film structure and morphology, Structure et morphologie; épaisseur, Structure and morphology; thickness, Domaines interdisciplinaires: science des materiaux; rheologie, Cross-disciplinary physics: materials science; rheology, Science des matériaux, Materials science, Méthodes de nanofabrication, Methods of nanofabrication, Formation de nanomotifs, Nanoscale pattern formation, Sciences appliquees, Applied sciences, Energie, Energy, Energie naturelle, Natural energy, Energie solaire, Solar energy, Conversion photovoltaïque, Photovoltaic conversion, Cellules solaires. Cellules photoélectrochimiques, Solar cells. Photoelectrochemical cells, Addition fluor, Fluorine addition, Adición fluor, Addition étain, Tin addition, Adición estaño, Caractéristique courant tension, Voltage current curve, Característica corriente tensión, Cellule solaire, Solar cell, Célula solar, Colorant organique, Organic dye, Colorante orgánico, Courant photoélectrique, Photoelectric current, Corriente fotoeléctrica, Facteur transmission, Transmittance, Factor transmisión, Formation motif, Patterning, Formacíon motivo, Gravure, Engraving, Grabado, Lithographie, Lithography, Litografía, Microscopie électronique balayage, Scanning electron microscopy, Microscopía electrónica barrido, Oxyde de titane, Titanium oxide, Titanio óxido, Photoconductivité, Photoconductivity, Fotoconductividad, Plasma couplé inductivement, Inductively coupled plasma, Résistivité couche, Sheet resistivity, Resistividad capa, Tension polarisation, Bias voltage, Voltage polarización, Traitement surface, Surface treatment, Tratamiento superficie, 5280Y, 6855J, 8116R, 8460J, TiO2, Dye-sensitized solar cell, Etching, Fluorine-doped tin oxide, and Transparent conducting oxide
- Abstract
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The surface modification of fluorine-doped tin oxide (FTO) transparent electrodes was carried out by lithography and inductively coupled plasma etching to improve the conversion efficiency of dye-sensitized solar cells (DSSCs). The concentration of Cl2 gas and dc-bias voltage to the substrate were varied as the main etch parameters. The transmittance and sheet resistance of the FTO electrodes were compared before and after etching. The DSSCs fabricated on the patterned FTO electrodes showed higher conversion efficiency than those fabricated on the ordinary FTO electrodes without patterns. Scanning electron microscopy showed that more TiO2 particles could be involved in the DSSCs with patterned FTO electrodes, and that the contact between the TiO2 layer and electrode were improved by patterning the FTO electrode. The current-voltage curves and incident photon to current efficiency spectra showed that a significantly higher photocurrent was produced in the DSSCs fabricated on the patterned FTO.
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SELLERS, Meredith C. K and SEEBAUER, Edmund G
- Thin solid films. 519(7):2103-2110
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Crystallography, Cristallographie cristallogenèse, Metallurgy, welding, Métallurgie, soudage, Condensed state physics, Physique de l'état condensé, Sciences exactes et technologie, Exact sciences and technology, Physique, Physics, Generalites, General, Instruments, appareillage, composants et techniques communs à plusieurs branches de la physique et de l'astronomie, Instruments, apparatus, components and techniques common to several branches of physics and astronomy, Techniques et équipements généraux, General equipment and techniques, Capteurs (chimiques, optiques, électriques, de mouvement, de gaz, etc.); télédétection, Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing, Chimie, Chemistry, Chimie generale et chimie physique, General and physical chemistry, Théorie des réactions, cinétique générale. Catalyse. Nomenclature, documentation chimique, informatique chimique, Theory of reactions, general kinetics. Catalysis. Nomenclature, chemical documentation, computer chemistry, Catalyse, Catalysis, Catalyseurs: préparations et propriétés, Catalysts: preparations and properties, Physicochimie de surface, Surface physical chemistry, Généralités, appareillage, General, apparatus, Sciences appliquees, Applied sciences, Energie, Energy, Energie naturelle, Natural energy, Energie solaire, Solar energy, Conversion photovoltaïque, Photovoltaic conversion, Cellules solaires. Cellules photoélectrochimiques, Solar cells. Photoelectrochemical cells, Addition manganèse, Manganese addition, Adición manganeso, Addition niobium, Niobium addition, Adición niobio, Anatase, Anatasa, Capteur mesure, Measurement sensor, Captador medida, Caractéristique capacité tension, Voltage capacity curve, Característica capacidad tensión, Catalyseur, Catalyst, Catalizador, Cellule solaire, Solar cell, Célula solar, Chrome, Chromium, Cromo, Circuit intégré, Integrated circuit, Circuito integrado, Colorant organique, Organic dye, Colorante orgánico, Composition chimique, Chemical composition, Composición química, Cristallinité, Crystallinity, Cristalinidad, Croissance cristalline en phase vapeur, Crystal growth from vapors, Densité porteur charge, Charge carrier density, Concentración portador carga, Diode barrière Schottky, Schottky barrier diode, Diodo barrera Schottky, Dopage semiconducteur, Semiconductor doping, Interface, Interfase, Mesure tension électrique, Voltage measurement, Méthode couche atomique, Atomic layer method, Método capa atómica, Méthode mesure, Measurement method, Método medida, Métrologie, Metrology, Metrología, Oxyde de titane, Titanium oxide, Titanio óxido, Photocatalyse, Photocatalysis, Fotocatálisis, Polycristal, Polycrystal, Policristal, Porteur libre, Free carrier, Portador libre, Semiconducteur, Semiconductor materials, Semiconductor(material), Silicium, Silicon, Silicio, Titane, Titanium, Titanio, Traitement surface, Surface treatment, Tratamiento superficie, 0707D, 8115K, 8460J, Si, TiO2, Atomic layer deposition, Capacitance-voltage, Carrier concentration, and Metal oxide semiconductor
- Abstract
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In direct contrast to the way in which silicon is precisely doped for integrated circuit applications in order to optimize device performance, there is little nuanced understanding of the correlation between TiO2 doping level, charge carrier concentration, and the operation of TiO2-based photocatalysts, dye-sensitized solar cells, and sensors. The present work outlines a rigorous methodology for the determination of free carrier concentration for doped metal oxide semiconductors such as TiO2 that are not amenable to standard metrology methods. Undoped, Cr-, Mn-, and Nb-doped polycrystalline anatase TiO2 are synthesized via atomic layer deposition (ALD) using Ti(OCH(CH3)2)4, H20, Cr(C5H7O2)3, Mn(DPM)3 (DPM = 2,2,6,6-tetramethyl-3, 5-heptanedionato), and Nb(OCH2CH3)5 as the source materials forTi, 0, Cr, Mn, and Nb, respectively. Chemical composition and crystallinity are investigated and a thorough device-like characterization ofTi02 Schottky diodes is carried out to justify the subsequent extraction of carrier concentration values from capacitance-voltage (C-V) measurements using the Mott-Schottky approach. The influence of factors such as substrate type, contact metal type, and surface and interface preparation are examined. Measurements of donor carrier concentration are obtained for undoped, Cr-, Mn-, and Nb-doped TiO2 synthesized by ALD. Possible causes for the obtained carrier concentrations are discussed.
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AW, K. C, SALIM, N. T, GAO, W, and LI, Z
- Proceedings of the International Conference on Materials for Advanced Technologies (ICMAT 2005) Symposium H: Silicon microelectronics: processing to packaging, Singapore, July 3-8, 2005Thin solid films. 504(1-2):243-247
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Crystallography, Cristallographie cristallogenèse, Electronics, Electronique, Metallurgy, welding, Métallurgie, soudage, Condensed state physics, Physique de l'état condensé, Sciences exactes et technologie, Exact sciences and technology, Physique, Physics, Etat condense: structure, proprietes mecaniques et thermiques, Condensed matter: structure, mechanical and thermal properties, Propriétés de transport (non électroniques), Transport properties of condensed matter (nonelectronic), Etat condense: structure electronique, proprietes electriques, magnetiques et optiques, Condensed matter: electronic structure, electrical, magnetic, and optical properties, Propriétés et matériaux magnétiques, Magnetic properties and materials, Etudes de matériaux magnétiques particuliers, Studies of specific magnetic materials, Verres de spin et autres matériaux magnétiques aléatoires, Spin glasses and other random magnets, Propriétés et matériaux diélectriques, piézoélectriques et ferroélectriques, Dielectrics, piezoelectrics, and ferroelectrics and their properties, Propriétés diélectriques des solides et des liquides, Dielectric properties of solids and liquids, Permittivité (fonction diélectrique), Permittivity (dielectric function), Sciences appliquees, Applied sciences, Electronique, Electronics, Electronique des semiconducteurs. Microélectronique. Optoélectronique. Dispositifs à l'état solide, Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices, Fabrication microélectronique (technologie des matériaux et des surfaces), Microelectronic fabrication (materials and surfaces technology), Composé minéral, Inorganic compound, Compuesto inorgánico, Composé organique, Organic compounds, Compuesto orgánico, Métal transition, Transition metal, Metal transición, Barrière diffusion, Diffusion barrier, Barrera difusión, Caractéristique capacité tension, Voltage capacity curve, Característica capacidad tensión, Constante diélectrique, Permittivity, Constante dieléctrica, Couche mince, Thin film, Capa fina, Cuivre, Copper, Cobre, Densification, Densificación, Diffraction RX, X ray diffraction, Difracción RX, Diffusion(transport), Diffusion, Diélectrique basse permittivité, Low k dielectric, Dieléctrico baja constante dieléctrica, Effet surface, Surface effect, Efecto superficie, Etude expérimentale, Experimental study, Estudio experimental, Métallisation, Metallizing, Metalización, Pulvérisation cathodique, Cathodic sputtering, Pulverización catódica, Siloxane polymère, Siloxane polymer, Siloxano polímero, Spectre SIMS, Secondary ion mass spectra, Spectre photoélectron RX, X-ray photoelectron spectra, Traitement par plasma, Plasma assisted processing, Traitement surface, Surface treatment, Tratamiento superficie, Verre spin, Spin glass, Vidrio spín, 7550L, 8540L, Cu, Low-k dielectric, Plasma treatment, and Surface modification
- Abstract
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Cu diffusion is one major problem that inhibits low-k dielectric to be integrated with existing fabrication technology effectively. This paper demonstrates the effects of surface modification towards polymethylsiloxane low-k dielectric (LKD 5109) from JSR Micro using gas mixture of H2+N2 plasma in order to improve Cu diffusion barrier. C- V plots indirectly indicated that plasma treatment reduces Cu+ ions penetration during Cu deposition using magnetron sputtering. XPS confirmed that short duration (10 to 30 s) of H2+N2 plasma treatment could cause surface densification of LKD 5109 low-k thin film through formation of N-C bonds. However, the negative effect of plasma treatment is the increment of dielectric constant (k) due to possible surface densification.
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TANAKA, H, OSAWA, T, MORIYOSHI, Y, KURIHARA, M, MARUYAMA, S, and ISHIGAKI, T
- The 16th Symposium on Plasma Science for Materials (SPSM-16), Tokyo, Japan, 4-5 June 2003Thin solid films. 457(1):209-216
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Crystallography, Cristallographie cristallogenèse, Electronics, Electronique, Metallurgy, welding, Métallurgie, soudage, Condensed state physics, Physique de l'état condensé, Sciences exactes et technologie, Exact sciences and technology, Physique, Physics, Etat condense: structure, proprietes mecaniques et thermiques, Condensed matter: structure, mechanical and thermal properties, Surfaces et interfaces; couches minces et trichites (structure et propriétés non électroniques), Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties), Interfaces solide-fluide, Solid-fluid interfaces, Cinétique d'adsorption et de désorption; évaporation et condensation, Adsorption and desorption kinetics; evaporation and condensation, Sciences appliquees, Applied sciences, Electrotechnique. Electroenergetique, Electrical engineering. Electrical power engineering, Electroénergétique, Electrical power engineering, Conversion directe et accumulation d'énergie, Direct energy conversion and energy accumulation, Conversion électrochimique: piles et accumulateurs électrochimiques, piles à combustibles, Electrochemical conversion: primary and secondary batteries, fuel cells, Composé minéral, Inorganic compound, Compuesto inorgánico, Batterie lithium, Lithium battery, Calorimétrie différentielle balayage, Differential scanning calorimetry, Análisis calorimétrico barrido exploración, Composition chimique, Chemical composition, Composición química, Cycle charge décharge, Discharge charge cycle, Ciclo carga descarga, Distribution dimension particule, Particle size distribution, Distribución dimensión partícula, Etude expérimentale, Experimental study, Estudio experimental, Graphite, Grafito, Matériau électrode, Electrode material, Material electrodo, Morphologie, Morphology, Morfología, Poudre, Powder, Polvo, Radiofréquence, Radiofrequency, Radiofrecuencia, Spectre Raman, Raman spectrum, Espectro Raman, Stabilité thermique, Thermal stability, Estabilidad térmica, TDS, Traitement par plasma, Plasma assisted processing, Traitement surface, Surface treatment, Tratamiento superficie, C, Electrochemical property: Thermal stability, Mesocarbon microbeads (MCMB), and Thermal plasma treatment
- Abstract
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Mesocarbon microbeads (MCMB) powders, which are known to be highly crystallized carbon materials and have a mean particle size of 11 μm, were treated in RF thermal plasma. Through the plasma treatment, the surface morphology, structure, and chemical composition of the powder were modified. The plasma-induced modification made the surface of MCMB particles disordered, and gave rise to an improvement in the thermal stability and electrochemical properties of the powders, such as the discharge capacity and first charge/discharge efficiency. It also made the powders suitable for further use as an anode in lithium-ion rechargeable batteries. Powders obtained without air exposure showed further improvement in anode performance.
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FEUGEAS, J. N, GOMEZ, B. J, SANCHEZ, G, FERRON, J, and CRAIEVICH, A
- Proceedings of the First International Conference on Materials for Advanced Technologies (ICMAT 2001), Symposium O, Suntec City, Singapore, 1-6 July, 2001Thin solid films. 424(1):130-138
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Crystallography, Cristallographie cristallogenèse, Electronics, Electronique, Metallurgy, welding, Métallurgie, soudage, Condensed state physics, Physique de l'état condensé, Sciences exactes et technologie, Exact sciences and technology, Physique, Physics, Domaines interdisciplinaires: science des materiaux; rheologie, Cross-disciplinary physics: materials science; rheology, Science des matériaux, Materials science, Traitements de surface, Surface treatments, Sciences appliquees, Applied sciences, Metaux. Metallurgie, Metals. Metallurgy, Transformation de matériaux métalliques, Production techniques, Surface treatment, Autres traitements de surface, Other surface treatments, Surface hardening: nitridation, carburization, carbonitridation, Acier inoxydable 304, Stainless steel-304, Acier inoxydable austénitique, Austenitic stainless steel, Acero inoxidable austenítico, Austenitischer nichtrostender Stahl, Atmosphère contrôlée, Controlled atmosphere, Atmósfera controlada, Kontrollierte Atmosphaere, Composition chimique, Chemical composition, Composición química, Chemische Zusammensetzung, Distribution concentration, Concentration distribution, Distribución concentración, Konzentrationsverteilung, Décharge impulsionnelle, Pulsed discharge, Descarga impulsional, Décharge luminescente, Glow discharge, Descarga luminiscente, Glimmentladung, Etude expérimentale, Experimental study, Estudio experimental, Experimentelle Untersuchung, Faisceau ionique, Ion beam, Haz iónico, Ionenstrahl, Faisceau pulsé, Pulsed beam, Haz pulsado, Nitruration, Nitriding, Nitruración, Nitrieren, Profil profondeur, Depth profile, Perfil profundidad, Tiefenprofil, Subsurface, Subsuelo, Traitement surface, Surface treatment, Tratamiento superficie, Oberflaechenbehandlung, Chromium alloy, Crystalline, Iron alloy, Synchrotron radiation, and X-Ray diffraction
- Abstract
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Chromium concentration on steels plays an important role in ion nitriding processes. In this work, the time variation of the concentration of the elements in the near-surface region of the AISI 304 (18% of Cr) stainless steel, during pulsed ion nitriding, was studied. The techniques used were the real time and in situ X-ray diffraction by Synchrotron radiation, Auger spectroscopy, Nuclear Reaction Analysis, and Conversion Electron Mossbauer Spectroscopy. Ion nitriding was performed with a 100 Hz square wave pulsed glow discharge, with different treatment times, in an atmosphere of 80% N2 and 20% H2 mixture, under a total pressure of 5.6 mbar. The high Cr concentration in the near surface layers (∼17 Å) and the intermediate 'S' phase formation were explained through the nitrogen ion sputtering during the ion nitriding process.
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PFISTERER, Fritz
- Proceedings of the Symposium B, Thin Film Chalcogenide Photovoltaic Materials, E-MRS Spring Meeting, Strasbourg, France, June 18-21, 2002Thin solid films. 431-32:470-476
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Crystallography, Cristallographie cristallogenèse, Electronics, Electronique, Metallurgy, welding, Métallurgie, soudage, Condensed state physics, Physique de l'état condensé, Sciences exactes et technologie, Exact sciences and technology, Sciences appliquees, Applied sciences, Energie, Energy, Energie naturelle, Natural energy, Energie solaire, Solar energy, Conversion photovoltaïque, Photovoltaic conversion, Cellules solaires. Cellules photoélectrochimiques, Solar cells. Photoelectrochemical cells, Cadmium sulfure, Cadmium sulfide, Cadmio sulfuro, Cellule couche mince, Thin film cell, Célula capa delgada, Cellule solaire, Solar cell, Célula solar, Cuivre sulfure, Copper sulfide, Cobre sulfuro, Epitaxie, Epitaxy, Epitaxia, Hétérojonction, Heterojunction, Heterounión, Traitement surface, Surface treatment, Tratamiento superficie, Polycrystalline films, Surface passivation, Topotaxy, and pn-Heterojunctions
- Abstract
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The particular properties of Cu2S-CdS heterojunctions are revealed. The effects of lattice mismatch on epitaxy as well as wet-and dry-topotaxy are discussed and preconditions for successful application of topotaxy are elaborated. The influence of surface treatments of the cells and of additional semiconducting or metallic layers of monolayer-range thicknesses at the surface is demonstrated. The junction formation technology and the surface treatments appear to be relevant also to other photovoltaic devices.
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NISHIWAKI, S, ENNAOUI, A, SCHULER, S, SIEBENTRITT, S, and LUX-STEINER, M. Ch
- Proceedings of the Symposium B, Thin Film Chalcogenide Photovoltaic Materials, E-MRS Spring Meeting, Strasbourg, France, June 18-21, 2002Thin solid films. 431-32:296-300
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Crystallography, Cristallographie cristallogenèse, Electronics, Electronique, Metallurgy, welding, Métallurgie, soudage, Condensed state physics, Physique de l'état condensé, Sciences exactes et technologie, Exact sciences and technology, Sciences appliquees, Applied sciences, Energie, Energy, Energie naturelle, Natural energy, Energie solaire, Solar energy, Conversion photovoltaïque, Photovoltaic conversion, Cellules solaires. Cellules photoélectrochimiques, Solar cells. Photoelectrochemical cells, Cellule couche mince, Thin film cell, Célula capa delgada, Cellule solaire, Solar cell, Célula solar, Cuivre séléniure, Copper selenides, Gallium séléniure, Gallium selenides, Performance, Rendimiento, Procédé fabrication, Manufacturing process, Procedimiento fabricación, Traitement surface, Surface treatment, Tratamiento superficie, CuGaSe2, Solar cells, Surface composition, and X-ray photoelectron spectroscopy
- Abstract
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Polycrystalline CuGaSe2 (CGS) films with slightly Ga-rich composition were prepared on Mo/soda-lime substrates by the 'bilayer' process. The film surfaces were modified by chemical bath treatment with In2(SO4)3, thioacetamid, and triethanolamin to improve the performance in solar cell applications. The film compositions were characterized by X-ray fluorescence and the surface of treated films was investigated by X-ray photoelectron spectroscopy (XPS). Solar cells with ZnO/CdS/CGS/Mo/soda-lime glass structure were fabricated, and the current-voltage properties and the quantum efficiency were analyzed. Improvement of the spectral response, especially in the long wavelength region, was observed for the samples treated with the chemical bath, which results in increase in a short circuit current density. An increase in the parallel and series resistance of the cells was also observed with the treatment. The surface compositions of the CGS thin films modified by the chemical bath are discussed on the base of the results of XPS.
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UEMURA, Sei, YOSHIDA, Manabu, HOSHINO, Satoshi, KODZASA, Takehito, and KAMATA, Toshihide
- The 5th International Conference on Nano-Molecular Electronics, Kobe, Japan, December 10-12, 2002Thin solid films. 438-39:378-381
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Crystallography, Cristallographie cristallogenèse, Electronics, Electronique, Metallurgy, welding, Métallurgie, soudage, Condensed state physics, Physique de l'état condensé, Sciences exactes et technologie, Exact sciences and technology, Sciences appliquees, Applied sciences, Electronique, Electronics, Electronique des semiconducteurs. Microélectronique. Optoélectronique. Dispositifs à l'état solide, Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices, Transistors, Caractéristique transfert, Transfer characteristic, Característica transferencia, Composé organique, Organic compounds, Compuesto orgánico, Couche double, Double layers, Courant drain, Drain current, Corriente dren, Diélectrique, Dielectric materials, Dieléctrico, Grille transistor, Transistor gate, Rejilla transistor, Méthacrylate de méthyle polymère, Methyl methacrylate polymer, Metacrilato de metilo polímero, Polymère, Polymer, Polímero, Revêtement, Coatings, Revestimiento, Traitement surface, Surface treatment, Tratamiento superficie, Transistor effet champ, Field effect transistor, Transistor efecto campo, Dielectrics, Electronic device, Insulator, Organic substance, and Polymers
- Abstract
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We have investigated a double layer structured polymer gate dielectric for the organic field-effect transistor (FET) with the purpose of improving the performance of the polymer gate insulator. A polymer gate dielectric often causes a large hysteresis in the transfer characteristics of the organic FET. In this study, a water-soluble clay mineral layer was inserted between the PMMA and pentacene layer. It brought about improvement of the drain current and disappearance of the hysteresis.
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FRITSCHE, J, SCHULMEYER, T, THISSEN, A, KLEIN, A, and JAEGERMANN, W
- Proceedings of the Symposium B, Thin Film Chalcogenide Photovoltaic Materials, E-MRS Spring Meeting, Strasbourg, France, June 18-21, 2002Thin solid films. 431-32:267-271
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Crystallography, Cristallographie cristallogenèse, Electronics, Electronique, Metallurgy, welding, Métallurgie, soudage, Condensed state physics, Physique de l'état condensé, Sciences exactes et technologie, Exact sciences and technology, Sciences appliquees, Applied sciences, Energie, Energy, Energie naturelle, Natural energy, Energie solaire, Solar energy, Conversion photovoltaïque, Photovoltaic conversion, Cellules solaires. Cellules photoélectrochimiques, Solar cells. Photoelectrochemical cells, Activation, Activación, Cadmium tellurure, Cadmium tellurides, Cellule couche mince, Thin film cell, Célula capa delgada, Cellule solaire, Solar cell, Célula solar, Procédé fabrication, Manufacturing process, Procedimiento fabricación, Traitement surface, Surface treatment, Tratamiento superficie, CdCl2-activation, CdS, CdTe, Interface, SnO2, and Thin film solar cell
- Abstract
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In thin film solar cell production several materials are subsequently deposited onto a glass substrate. The interface properties between the different layers are important for the opto-electrical performance of the solar cell device. CdTe thin film solar cells are currently produced using a layer sequence of CdTe/CdS/SnO2/ITO/glass. In order to reach reasonable conversion efficiencies the device has to be activated in a CdCl2 atmosphere. Finally, the back contact is prepared. The influence of the activation step on the solar cell is still not understood in detail. Therefore in this study model experiments have been carried out in which CdS and CdTe thin films with a thickness of 100 nm have been deposited by thermal evaporation onto ITO/SnO2-coated glass substrates in an UHV system. The influence of the CdCl2-activation step on the morphology, chemistry and band alignment of the interfaces has been investigated with atomic force microscopy and sputter depth profiling using X-ray photoelectron spectroscopy. A change in surface morphology due to the CdCl2-activation has only been found for the CdTe layer, while the SnO2 and CdS films are unaffected. It can be shown that the activation step leads to diffusion processes at both interfaces. For the CdS/CdTe interface an interdiffusion of CdS and CdTe takes place. At the SnO2/CdS interface Cd diffuses into the SnO2 layer with a constant amount of approximately 5% Cd in the whole SnO2 layer. The diffusion and interdiffusion changes the electronic properties of the interfaces. A strong n-type doping for all semiconductor films is observed after the activation.
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KODAMA, Satoshi, HABAKI, Hiroaki, SEKIGUCHI, Hidetoshi, and KAWASAKI, Junjiro
- Proceedings of the 14th symposium on plasma science for materials (SPSM14), Tokyo, Japan, 13-14 June 2001Thin solid films. 407(1-2):151-155
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Crystallography, Cristallographie cristallogenèse, Electronics, Electronique, Metallurgy, welding, Métallurgie, soudage, Condensed state physics, Physique de l'état condensé, Sciences exactes et technologie, Exact sciences and technology, Chimie, Chemistry, Chimie generale et chimie physique, General and physical chemistry, Physicochimie de surface, Surface physical chemistry, Interface solide-liquide, Solid-liquid interface, Etat colloïdal et états dispersés, Colloidal state and disperse state, Matériaux poreux, Porous materials, Métal transition Ion, Transition metal Ions, Metal transición Ión, Propriété surface, Surface properties, Propiedad superficie, Adsorption liquide solide, Liquid solid adsorption, Adsorción líquido sólido, Aire superficielle, Surface area, Area superficial, Capacité adsorption, Adsorption capacity, Capacidad adsorción, Charbon actif, Activated carbon, Carbón activado, Cuivre ion, Copper ion, Cobre ión, Etude expérimentale, Experimental study, Estudio experimental, Matériau absorbant, Absorbent material, Material absorbente, Matériau modifié, Modified material, Material modificado, Oxygène, Oxygen, Oxígeno, Plasma non thermique, Non thermal plasma, Plasma no térmico, Site acide, Acidic site, Sitio ácido, Traitement surface, Surface treatment, Tratamiento superficie, Zinc ion, and Zinc ión
- Abstract
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Granular activated carbon was treated by oxygen non-thermal plasma to improve its adsorbability for metal ions. The plasma was produced by dielectric barrier discharge under atmospheric pressure. The results of characterization of activated carbon showed that its surface area was decreased, and the concentrations of acidic functional groups at the surface were increased by the treatment. Adsorbability was examined changing the initial pH of the solution containing a metal ion. The saturated adsorption amount of Cu and Zn ion was increased considerably by the treatment. The plasma treatment of activated carbon was concluded as an effective method for improvement of adsorbability.
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ILIADIS, A. A, VISPUTE, R. D, VENKATESAN, T, and JONE, K. A
- Proceedings of the 29th international conference on metallurgical coatings and thin films, San Diego, CA, USA, April 22-26, 2002 (ICMCTF2002)Thin solid films. 420-21:478-486
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Crystallography, Cristallographie cristallogenèse, Electronics, Electronique, Metallurgy, welding, Métallurgie, soudage, Condensed state physics, Physique de l'état condensé, Sciences exactes et technologie, Exact sciences and technology, Sciences appliquees, Applied sciences, Electronique, Electronics, Electronique des semiconducteurs. Microélectronique. Optoélectronique. Dispositifs à l'état solide, Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices, Interfaces, Caractéristique électrique, Electrical characteristic, Característica eléctrica, Composé binaire, Binary compound, Compuesto binario, Contact métal semiconducteur, Semiconductor metal contact, Contacto metal semiconductor, Contact ohmique, Ohmic contact, Contacto óhmico, Effet tunnel, Tunnel effect, Efecto túnel, Métallisation dispositif semiconducteur, Semiconductor device metallizing, Méthode TLM, TLM method, Método TLM, Platine, Platinum, Platino, Résistance contact, Contact resistance, Resistencia contacto, Semiconducteur bande interdite large, Wide band gap semiconductors, Silicium carbure, Silicon carbide, Silicio carburo, Technologie faisceau ion focalisé, Focused ion beam technology, Titane nitrure, Titanium nitride, Titanio nitruro, Traitement surface, Surface treatment, Tratamiento superficie, Tungstène, Tungsten, Wolframio, Zinc oxyde, Zinc oxide, Zinc óxido, C Si, N Ti, O Zn, Pt, SiC, TiN, W, ZnO, Focused ion beam, and Ohmic contacts
- Abstract
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Ohmic contact metallizations on p-type 6H-SiC and n-type ZnO using a novel approach of focused ion beam (FIB) surface-modification and direct-write metal deposition will be reviewed, and the properties of such focused ion beam assisted non-annealed contacts will be reported. The process uses a Ga focused ion beam to modify the surface of the semiconductor with different doses, and then introduces an organometallic compound in the Ga ion beam, to effect the direct-write deposition of a metal on the modified surface. Contact resistance measurements by the transmission line method produced values in the low 10 -4 Ω cm2 range for surface-modified and direct-write Pt and W non-annealed contacts, and mid 10-5 Ω cm2 range for surface-modified and pulse laser deposited TiN contacts. An optimum Ga surface-modification dosage window is determined, within which the current transport mechanism of these contacts was found to proceed mainly by tunneling through the metal-modified-semiconductor interface layer.
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YOSHIKI, Hiroyuki, OKI, Akio, OGAWA, Hiroki, and HORIIKE, Yasuhiro
- Proceedings of the 14th symposium on plasma science for materials (SPSM14), Tokyo, Japan, 13-14 June 2001Thin solid films. 407(1-2):156-162
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Crystallography, Cristallographie cristallogenèse, Electronics, Electronique, Metallurgy, welding, Métallurgie, soudage, Condensed state physics, Physique de l'état condensé, Sciences exactes et technologie, Exact sciences and technology, Sciences appliquees, Applied sciences, Industrie des polymeres, peintures, bois, Polymer industry, paints, wood, Technologie des polymères, Technology of polymers, Formes d'application et semiproduits, Forms of application and semi-finished materials, Tubes, Couplage capacitif, Capacitive coupling, Acoplamiento electrostático, Effet champ électrique, Electric field effect, Efecto campo eléctrico, Electroosmose, Electroosmosis, Electro-osmosis, Ethylène téréphtalate polymère, Ethylene terephthalate polymer, Etileno tereftalato polímero, Etude expérimentale, Experimental study, Estudio experimental, Plasma, Relation mise en œuvre propriété, Property processing relationship, Relación puesta en marcha propiedad, Surface concave, Concave surface, Superficie cóncava, Temps traitement, Processing time, Tiempo proceso, Traitement surface, Surface treatment, Tratamiento superficie, Tube capillaire, Capillary tube, Tubo capilar, Vitesse écoulement, Flow velocity, Velocidad flujo, Microplasma, and Paroi interne
- Abstract
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A new capacitively coupled microplasma (CCMP) operated at atmospheric pressure is presented. Using a conventional excitation frequency of 13.56 MHz, a stable micro-glow discharge was generated in a capillary, whose cross-section is 65 ∼500×500∼5000 μm2, on a 20×20 mm2 dielectric chip. To attain plasma generation at a low RF power with no reflected power, a π-type matching circuit was miniaturized and suitably designed to satisfy the electric resonance condition with the excitation frequency, so that an atmospheric He discharge was generated at an incident power of 1∼3 W. He atomic excitation temperature was evaluated to be 2000∼2100 K at atmospheric pressure at 5 W by a Boltzmann plot. Atmospheric Ar glow discharge was also attained at 9 W in a quartz capillary with a cross-section of 65 X 2800 μm2. The microplasma was applied to inner wall modification of a poly(ethylene terephthalate) (PET) capillary with a cross-section of 500×500 μm2 to demonstrate the electro-osmosis flow (EOF) control on the micro-capillary electrophoresis (CE) chips. We found that the mobility of the EOF (μEOF) of the PET capillary treated by the plasma of He/O2 (3%) mixture was 4.8×10-4 (cm2/Vs), which is approximately three times as large as that of the untreated PET capillary.
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18. Influence of interface treatments on the performance of silicon heterojunction solar cells [2002]
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CARABE, J and GANDIA, J. J
- Proceeding of Symposium P on Thin Film Materials for Photovoltaics, E-MRS Spring Conference, Strasbourg, France, June 5-8, 2001Thin solid films. 403-04:238-241
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Crystallography, Cristallographie cristallogenèse, Electronics, Electronique, Metallurgy, welding, Métallurgie, soudage, Condensed state physics, Physique de l'état condensé, Sciences exactes et technologie, Exact sciences and technology, Sciences appliquees, Applied sciences, Energie, Energy, Energie naturelle, Natural energy, Energie solaire, Solar energy, Conversion photovoltaïque, Photovoltaic conversion, Cellules solaires. Cellules photoélectrochimiques, Solar cells. Photoelectrochemical cells, Cellule solaire silicium, Silicon solar cells, Couche mince, Thin film, Capa fina, Hétérojonction, Heterojunction, Heterounión, Jonction p n, p n junction, Unión p n, Matériau cristallin, Crystalline material, Material cristalino, Méthode PECVD, Plasma enhanced chemical vapor deposition, Performance, Rendimiento, Traitement surface, Surface treatment, and Tratamiento superficie
- Abstract
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So-called heterojunction silicon solar cells are generating increasing interest. They differ from conventional crystalline- or multicrystalline-silicon devices in that, instead of forming the emitter/s by thermal-diffusion doping of the absorber, they are deposited as silicon thin films by plasma-enhanced chemical vapour deposition (PECVD) or some other thin-film technique. The approach has important advantages such as good uniformities, low temperatures, excellent thickness control, etc., making the procedure essential for the development of new-generation cells based on ribbon silicon and similar materials. The performance of heterojunction silicon cells is dramatically influenced by the thin-film/absorber interface. Impurities in the junction, passivation of defects, lattice matching and band structure are absolutely crucial. The present paper describes a number of investigations on the preparation of n-p cells made by depositing n-type thin-film silicon by PECVD onto p-type crystalline-silicon wafers. The work is focused on the dependence of cell performance on the treatments applied to the crystalline-silicon surface prior to thin-film deposition. The results show that a treatment with a hydrogen plasma prior to emitter deposition can lead to important efficiency improvements attributed to defect passivation.
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TUCCI, M, SALURSO, E, ROCA, F, and PALMA, F
- Proceeding of Symposium P on Thin Film Materials for Photovoltaics, E-MRS Spring Conference, Strasbourg, France, June 5-8, 2001Thin solid films. 403-04:307-311
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Crystallography, Cristallographie cristallogenèse, Electronics, Electronique, Metallurgy, welding, Métallurgie, soudage, Condensed state physics, Physique de l'état condensé, Sciences exactes et technologie, Exact sciences and technology, Physique, Physics, Domaines interdisciplinaires: science des materiaux; rheologie, Cross-disciplinary physics: materials science; rheology, Science des matériaux, Materials science, Traitements de surface, Surface treatments, Sciences appliquees, Applied sciences, Energie, Energy, Energie naturelle, Natural energy, Energie solaire, Solar energy, Conversion photovoltaïque, Photovoltaic conversion, Cellules solaires. Cellules photoélectrochimiques, Solar cells. Photoelectrochemical cells, Surface cleaning, etching, patterning, Non métal, Non metal, No metal, Caractéristique capacité tension, Voltage capacity curve, Característica capacidad tensión, Cellule solaire, Solar cell, Célula solar, Courant obscurité, Dark current, Corriente obscuridad, Densité défaut cristallin, Crystal defect density, Densidad defecto cristalino, Etat cristallin, Crystalline state, Estado cristalino, Etude expérimentale, Experimental study, Estudio experimental, Fabrication, Manufacturing, Fabricación, Gravure plasma, Plasma etching, Grabado plasma, Hétérojonction, Heterojunction, Heterounión, Interface solide solide, Solid solid interface, Interfase sólido sólido, Matériau amorphe hydrogéné, Amorphous hydrogenated material, Material amorfo hidrogenado, Passivation, Pasivación, Photoconductivité, Photoconductivity, Fotoconductividad, Prétraitement, Pretreatment, Pretratamiento, Relation fabrication propriété, Fabrication property relation, Relación fabricación propiedad, Semiconducteur, Semiconductor materials, Semiconductor(material), Silicium, Silicon, Silicio, Traitement surface, Surface treatment, Tratamiento superficie, Si, and a-Si:H
- Abstract
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In this work we showed a comparison of the effect of H2, CF4/O2, RF dry etching on the properties of the heterostructure device useful for photovoltaic application. To this aim we performed low temperature (50-300 K) capacitance measurements in a wide range of probe signal frequencies (10 Hz-10 kHz). Differences in the capacitance profile between samples with various plasma dry treatments indicated different defect density profile at interface. With the aid of a finite difference model of the capacitance as a function of temperature and frequency we extracted information about the defect distribution at interface, that greatly influence the photovoltaic properties of the devices. As a result, the density and the nature of defects at interface has been correlated to the technological parameters: wafer cleaning procedure, hydrogen plasma treatment, type and concentration of dopants at interface.
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DOMER-REISEL, Annett, SCHÜRER, Christian, NISCHAN, Claudia, SEIDEL, Olaf, and MÜLLER, Eberhard
- Proceedings of the 29th international conference on metallurgical coatings and thin films, San Diego, CA, USA, April 22-26, 2002 (ICMCTF2002)Thin solid films. 420-21:263-268
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Crystallography, Cristallographie cristallogenèse, Electronics, Electronique, Metallurgy, welding, Métallurgie, soudage, Condensed state physics, Physique de l'état condensé, Sciences exactes et technologie, Exact sciences and technology, Physique, Physics, Domaines interdisciplinaires: science des materiaux; rheologie, Cross-disciplinary physics: materials science; rheology, Science des matériaux, Materials science, Méthodes de dépôt de films et de revêtements; croissance de films et épitaxie, Methods of deposition of films and coatings; film growth and epitaxy, Epitaxie en phase vapeur; croissance en phase vapeur, Vapor phase epitaxy; growth from vapor phase, Sciences biologiques et medicales, Biological and medical sciences, Sciences medicales, Medical sciences, Chirurgie (generalites). Transplantations, greffes d'organes et de tissus. Pathologie des greffons, Surgery (general aspects). Transplantations, organ and tissue grafts. Graft diseases, Technologie. Biomatériaux. Equipements, Technology. Biomaterials. Equipments, Non métal, Non metal, No metal, Additif, Additive, Aditivo, Biocompatibilité, Biocompatibility, Biocompatibilidad, Biomatériau, Biomaterial, Calcium oxyde, Calcium oxide, Calcio óxido, Carbone, Carbon, Carbono, Couche mince, Thin film, Capa fina, Culture cellulaire, Cell culture, Cultivo celular, Dépôt plasma, Plasma deposition, Depósito plasma, Etude expérimentale, Experimental study, Estudio experimental, Fibroblaste, Fibroblast, Fibroblasto, Génie biomédical, Biomedical engineering, Ingeniería biomédica, Matériau amorphe hydrogéné, Amorphous hydrogenated material, Material amorfo hidrogenado, Matériau modifié, Modified material, Material modificado, Mouillage, Wetting, Remojo, Revêtement, Coatings, Revestimiento, Rugosité, Roughness, Rugosidad, Topographie surface, Surface topography, Traitement surface, Surface treatment, Tratamiento superficie, a-C:H, Cell culture test, Diamond-like carbon, and Doping
- Abstract
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Diamond-like carbon (DLC) coatings are deposited on glass substrates by plasma decomposition of gaseous carbon precursors in a direct current discharge. In addition to the hydrocarbon gas, CaO-H2O vapor is supplied to the continuously evacuated vacuum chamber via two mass flow controllers and a needle valve for the CaO-H2O inlet. While maintaining the same deposition time and relative partial pressure of the hydrocarbon, the relative partial pressure of the CaO-H2O vapor was modified. The first information about the biocompatibility was gained by cell experiments with L929 mouse fibroblasts, sessile drop tests, scanning electron and atomic force microscopy, and correlated to the microstructure of the coatings. While mouse fibroblasts of the type L929 attach and grow on unmodified DLC coatings synthesized by the decomposition of hydrocarbon, the addition of CaO-H2O into the precursor gas improves the coatings biological acceptance by the cells.
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