Keywords: aluminum nitride (AlN); piezoelectric thin film; quartz; surface acoustic wave device Abstract In this paper, we have fabricated surface acoustic wave (SAW) devices with six sets of interdigital transducers (IDTs) on half-inch wafers of quartz with deposited thin films of aluminum nitride (AlN). Firstly, AlN thin films have been deposited by reactive sputtering in Ar-N.sub.2 gas mixture at 400°C with the high-power impulse magnetron sputtering (HiPIMS) system which was developed for microfabrication process in the localized clean environment with half-inch wafer (Minimal Fab). After that, IDTs of Al thin films have been prepared on the AlN thin films. The X-ray diffraction (XRD) pattern of the AlN thin films shows that the AlN films have c-axis (002) orientation. Furthermore, the frequency responses have been measured with four paired IDTs of the SAW devices, which were selected from six sets of IDTs as an input electrode and an output electrode. These results show device properties responding to the design of the IDTs and also suggest the potential of the fabricated SAW devices as the four-paralleled frequency filter and/or sensing system. Biographical information: Asahi Nagano, student member. In 2021 graduated from Kyushu Institute of Technology (School of Computer Sci. and Systems Eng., Mech. Information Sci. and Tech.). B.Eng. (Computer Eng.). Since 2021 postgraduate studies at the Grad. School (Grad. School of Computer Sci. and Systems Eng., Dept. of Interdisciplinary Informatics). Research in fabrication and application of SAW devices and micro-heaters. Kanato Kitamura, non-member. In 2019 graduated from Kyushu Institute of Technology (School of Computer Sci. and Systems Eng., Mech. Information Sci. and Tech.), 2019-2021 postgraduate studies at the Grad. School (Grad. School of Computer Sci. and Systems Eng., Dept. of Creative Informatics). When at the Grad. School, research in design, fabrication, and application of various micro-devices including SAW devices. M.Eng. (Computer Eng.). Shuichi Noda, non-member. In 1984 completed master's course at Niigata University (Grad. School of Eng., Dept. of Chem. Eng.), and was employed by Oki Electric. Development of processes and systems for micromachining using electron beams, SOR light, and plasma etching. 2005 completed doctorate at Tohoku University (Grad. School of Eng., Dept. of Mech. Eng. Intelligent Systems). D.Eng. In 2009 was employed by AIST (Nanoelectronics Research Center), 2015 Tohoku University (Micro System Integration Center), since 2017 invited senior researcher at AIST (Device Technology Research Institute). Development of various manufacturing processes and equipments for Minimal Fab. Sunao Murakami, member. In 2006 completed doctoral course at Kyushu University (Grad. School of Eng., Chem. Eng.). D.Eng. Was worked at National Cardiovascular Center Research Institute, then post-doctoral research fellow at AIST, 2012 assistant professor at Kyushu Institute of Technology (Fac. of Computer Sci. and Systems Eng.), since 2018 associate professor. Design and prototyping of various microdevice and systems including SAW devices, research and education in micromachining of silicon glass and various thin films. Kohei Iguchi, non-member. In 2020 graduated from Kyushu Institute of Technology (School of Computer Sci. and Systems Eng., Mech. Information Sci. and Tech.), 2020-2022 postgraduate studies at the Grad. School (Grad. School of Computer Sci. and Systems Eng., Dept. of Interdisciplinary Informatics). When at the Grad. School, research microfabrication processes for SAW devices. M.Eng. (Computer Eng.). Sommawan Khumpuang, non-member. In 2002 completed master's course at University of Bristol (UK), 2006 completed doctorate at Ritsumeikan University (Grad. School of Sci. and Eng.), 2007 worked at University of Freiburg (Germany), 2011 employed by AIST to develop Minimal Fab together with S. Hara (see below), including launch of Minimal Fab systems and trial manufacture of various microdevices. Now senior researcher at AIST (Device Technology Research Institute). Shiro Hara, non-member. Assistant professor at Waseda University (Fac. of Sci. and Eng.), then post-doctral research fellow at RIKEN, 1993 employed by the Electrotechnical Laboratory. Now prime senior researcher at AIST (Device Technology Research Institute) and head of Minimal System Group. 2012-2015 project leader of Minimal Fab National Project (Minimal Fab). Now founded Minimal Fab Promotion Organization to promote industrialization. Article Note: Translated from Volume 142 Number 9, pages 248-253, DOI: 10.1541/ieejsmas.142.248 of IEEJ Transactions on Sensors and Micromachines (Denki Gakkai Ronbunshi E) Byline: Asahi Nagano, Kanato Kitamura, Shuichi Noda, Sunao Murakami, Kohei Iguchi, Sommawan Khumpuang, Shiro Hara