Abstract
Abstract:
Turbomolecular pumps (TMPs), boasting advantageous high pumping rates, stability, and cleanliness, have been widely used in the semiconductor and photoelectric industries. In the aviation industry, the lightweight rotors of turbomolecular pumps can enhance the performance of generators. With technological advancements and increased industrial performance demands, various designs for turbomolecular pump rotors utilizing twisted and curved blade surfaces have been proposed. This increase in complexity runs parallel with machining difficulties. Contact and noncontact reverse engineering equipment was used to reconstruct a computer-aided design (CAD) model of turbomolecular pump rotors. The machining of thin and long blades, cutting tool arrangement, and toolpath was planned. Postprocessing was used to convert the toolpath into numerical control (NC) programming codes, which were combined with solid model cutting simulation software to verify the efficacy of the generated machining NC program for turbomolecular pump rotors. A five-axis horizontal machining center (CK type) with aluminum alloy AL6061-T6 was used to conduct actual machining tests measuring the efficiency of the machining methods. The rapid prototyping (RP) blocks can be creatively used as a jig and stuffed between the blades to suppress the chatter problem during processing, and the roughness of the surface of the blades can be reduced from 4.4 μm to 1.3 μm. The processed rotor can meet the flow test requirements, and the overall research can be used as a reference for the industry.
