Nanofabrication [electronic resource] : techniques and principles / Maria Stepanova, Steven Dew, editors.
- Language:
- English
- Imprint:
- Vienna : SpringerWienNewYork, c2012.
- Format:
-
- Book
- 1 online resource (viii, 344 p.)
- Bibliography:
- Includes bibliographical references.
- Contents:
-
- Pt. 1. Introduction
- pt. 2. Nanolithography
- pt. 3. Deposition at the nanoscale
- pt. 4. Nanoscale etching and patterning.
- Contributor:
- Stepanova, Maria (Maria G.)
Dew, Steven. - Subjects:
- ISBN:
-
9783709104248
3709104246
- Catkey: 9517817
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