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Nanofabrication [electronic resource] : techniques and principles / Maria Stepanova, Steven Dew, editors.

Availability

Online

Other libraries

Language:
English.
Publication date:
2012
Imprint:
Vienna : SpringerWienNewYork, c2012.
Format:
  • Book
  • 1 online resource (viii, 344 p.)
Bibliography:
Includes bibliographical references.
Contents:
  • Pt. 1. Introduction
  • pt. 2. Nanolithography
  • pt. 3. Deposition at the nanoscale
  • pt. 4. Nanoscale etching and patterning.
Contributor:
Stepanova, Maria (Maria G.)
Dew, Steven.
Subjects:
ISBN:
9783709104248
3709104246

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