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Fabrication engineering at the micro and nanoscale / Stephen A. Campbell.

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Author/Creator:
Campbell, Stephen A., 1954-
Language:
English.
Publication date:
2008
Imprint:
3rd ed. - New York : Oxford University Press, 2008.
Format:
  • Book
  • xiv, 647 p. : ill. ; 24 cm.
Note:
Rev. ed. of: The science and engineering of microelectronic fabrication. 2nd. ed.
Bibliography:
Includes bibliographical references and index.
Related Work:
Campbell, Stephen A., 1954- Science and engineering of microelectronic fabrication.
Series:
The Oxford series in electrical and computer engineering
Oxford series in electrical and computer engineering.
Subjects:
ISBN:
9780195320176
0195320174

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