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TK7871.85 .C25 2008
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Fabrication engineering at the micr...2008Chemistry & ChemEng Library (Swain) » TK7871.85 .C25 2008
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2013Chemistry & ChemEng Library (Swain) » TK7871.85 .C25 2013
Show full pageFabrication engineering at the micro and nanoscale / Stephen A. Campbell.
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- Author/Creator:
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Campbell, Stephen A., 1954-
- Language:
- English
- Imprint:
- 3rd ed. - New York : Oxford University Press, 2008.
- Format:
-
- Book
- xiv, 647 p. : ill. ; 24 cm.
- Note:
- Rev. ed. of: The science and engineering of microelectronic fabrication. 2nd. ed.
- Bibliography:
- Includes bibliographical references and index.
- Related Work:
- Campbell, Stephen A., 1954- Science and engineering of microelectronic fabrication.
- Series:
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The Oxford series in electrical and computer engineering
Oxford series in electrical and computer engineering. - Subjects:
- ISBN:
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9780195320176
0195320174 - Catkey: 7868801
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