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Semiconductor silicon 2002 : proceedings of the Ninth International Symposium on Silicon Materials Science and Technology / editors, H.R. Huff, L. Fabry, S. Kishino ; sponsoring division, Electronics.

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Meeting:
International Symposium on Silicon Materials Science and Technology (9th : 2002 : Philadelphia, Pa.)
Language:
English
Imprint:
Pennington, N.J. : Electrochemical Society, c2002.
Format:
  • Book, Conference Proceedings
  • 2 v. (xx, 1074 p.) : ill. ; 24 cm.
Title Variation:
Proceedings of the Ninth International Symposium on Silicon Materials Science and Technology
Silicon materials science and technology
Note:
"... contains papers presented at the Ninth International Symposium on Silicon Materials Science and Technology, held May 13-17, 2002 in Philadelphia ... Sponsored by the Electronics Division of the Electrochemical Society ..."--Pref.
Bibliography:
Includes bibliographical references and index.
Contributor:
Huff, Howard R.
Fábry, László.
Kishino, Seigo.
Electrochemical Society. Electronics Division.
Series:
Proceedings ; v. 2002-2
Proceedings (Electrochemical Society) ; v. 2002-2.
Subjects:
ISBN:
1566773687
1566773733
1566773741
9781566773683
9781566773737
9781566773744

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