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3781 2000 F
Show full pageStress evolution in molybdenum / silicon multilayer mirrors for extreme ultraviolet lithography / James Mac Freitag.
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- Author/Creator:
-
Freitag, James Mac.
- Language:
- English
- Imprint:
- 2000.
- Format:
-
- Book, Thesis
- x, 111 leaves, bound.
- Note:
- Submitted to the Department of Materials Science and Engineering. Copyright by the author.
- Note:
- Thesis (Ph. D.) -- Stanford University, 2000.
- Contributor:
- Clemens, B. M. (Bruce M.), primary advisor.
Stanford University. Department of Materials Science and Engineering
- Catkey: 4701190
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