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Stress evolution in molybdenum / silicon multilayer mirrors for extreme ultraviolet lithography / James Mac Freitag.

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Author/Creator:
Freitag, James Mac.
Language:
English.
Publication date:
2000
Imprint:
2000.
Format:
  • Book, Thesis
  • x, 111 leaves, bound.
Note:
Submitted to the Department of Materials Science and Engineering. Copyright by the author.
Note:
Thesis (Ph. D.) -- Stanford University, 2000.
Contributor:
Clemens, B. M. (Bruce M.), primary advisor.
Stanford University. Department of Materials Science and Engineering

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