jump to search box

Journal of vacuum science & technology. B, Microelectronics and nanometer structures : processing, measurement, and phenomena : an official journal of the American Vacuum Society.

Availability

Online

At the Library

  • Online only - Serials
    • Years (or vols.) after 2009 available online.
    • Library has: 2nd ser.:v.9(1991)-2nd ser.:v.27(2009)

Other libraries

Language:
English.
Beginning date:
1991
Imprint:
New York : Published for the Society by the American Institute of Physics, c1991-
Format:
  • Journal/Periodical
  • v. : ill. ; 29 cm.
Title Variation:
Microelectronics and nanometer structures
Journal of vacuum science and technology. B, Microelectronics and nanometer structures
JVST B
Frequency:
Bimonthly
Vol/date range:
2nd ser., v. 9, no. 1 (Jan./Feb. 1991)-
Note:
Title from cover. On cover, <Sept./Oct. 1994->: JVST B.
Note:
Vols. for <Jan. 1995- > available also in PDF and PostScript formats via the WWW; abstracts also available <1983-> in HTML format via World Wide Web searchable database; restricted to institutions with a site/user ID and password.
Related Items:
Includes: Molecular Beam Epitaxy Workshop. Proceedings of the ... Molecular Beam Epitaxy Workshop, and: North American Conference on Molecular Beam Epitaxy. Papers from the ... North American Conference on Molecular Beam Epitaxy, also published separately.
Includes as the Nov./Dec. issue, 1993- : International Symposium on Electron, Ion, and Photon Beams. Papers from the ... International Symposium on Electron, Ion, and Photon Beams.
Includes an issue: U.S. Workshop on the Physics and Chemistry of Mercury Cadmium Telluride and Related II-VI Compounds. Proceedings of the ... U.S. Workshop on the Physics and Chemistry of Mercury Cadmium Telluride and Related II-VI Compounds.
One special issue each year contains the Proceedings of the ... International Vacuum Microelectronics Conference; which is also published as a separate publication.
Note:
Available online to Stanford-affiliated users.
Contributor:
American Vacuum Society.
Continues:
Journal of vacuum science & technology. B, Microelectronics processing and phenomena (0734-211X)
Subjects:
ISSN:
1071-1023
Key Title:
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena

powered by Blacklight
© Stanford University. Stanford, California 94305. (650) 725-1064. Terms of Use | Copyright Complaints | Opt Out of Analytics
jump to top